US Patent Application 20120019122 - DEVICE HAVING ALIGNED CARBON NANOTUBE
InventorsUS Classes313/310, DISCHARGE DEVICES HAVING A THERMIONIC OR EMISSIVE CATHODE427/569, Plasma (e.g., corona, glow discharge, cold plasma, etc.)216/37, ETCHING AND COATING OCCUR IN THE SAME PROCESSING CHAMBER977/742, Carbon nanotubes (CNTs)977/752, Multi-walled977/842, For carbon nanotubes or fullerenes977/939Electron emitter (e.g., Spindt emitter tip coated with nanoparticles, etc.)International ClassesH01J 1/00C23C 16/50 C23C 16/26 Abstract textA method comprising patterning a substrate to form exposed regions of the substrate sized to deter entangled growth of carbon nanotubes thereon and growing vertically aligned nanotubes on the exposed regions of the substrate. |
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