InventorsAssigneesUS Classes318/652, With particular position measuring instruments359/1HOLOGRAPHIC SYSTEM OR ELEMENTAttorney, Agent or FirmForeign Documents- 10-2008-0089328 KR 09/10/2008
International Classes G02B 26/08 G05B 1/02 G03H 1/00
Abstract textAn actuator using a piezoelectric element and a method of driving the same. The actuator includes at least one piezoelectric cell moving by displacement according to an input voltage, at least one piezoelectric sensor sensing the displacement of the at least one piezoelectric cell, an error detector detecting an error in the at least one piezoelectric sensor, and a feedback signal generator generating a feedback signal corresponding to the error, thereby performing micromirror driving and sensing. |