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US Patent Application 20100060966 - ACTUATOR USING PIEZOELECTRIC ELEMENT AND METHOD OF DRIVING THE SAME

Application 20100060966 Filed on September 10, 2009. Published on March 11, 2010

Inventors

Assignees

US Classes

318/652, With particular position measuring instruments359/1HOLOGRAPHIC SYSTEM OR ELEMENT

Attorney, Agent or Firm

Foreign Documents

  • 10-2008-0089328 KR 09/10/2008

International Classes

G02B 26/08
G05B 1/02
G03H 1/00


Abstract text


An actuator using a piezoelectric element and a method of driving the same. The actuator includes at least one piezoelectric cell moving by displacement according to an input voltage, at least one piezoelectric sensor sensing the displacement of the at least one piezoelectric cell, an error detector detecting an error in the at least one piezoelectric sensor, and a feedback signal generator generating a feedback signal corresponding to the error, thereby performing micromirror driving and sensing.

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