Abstract text

To provide a piezoelectric pump including: a structure including a piezoelectric element and a support member that supports the piezoelectric element; and a first substrate and a second substrate that sandwich the structure, wherein the piezoelectric pump has: a pump chamber surrounded by the second substrate and the structure; and a first opening and a second opening that are communicated with the pump chamber, and wherein a space is provided so that the structure flexes in a direction opposite to the pump chamber according to an operation of the piezoelectric element.