Abstract text

An ultrasonic motorized stage includes a base part, first and second tables, first and second linear ultrasonic motors which respectively drive the first and the second tables, and first and second optical linear sensors which respectively detect the amount of move of the first and the second tables. The first and the second linear ultrasonic motors and the first and the second optical linear sensors are arranged in positions, which are at sides other than the front side of the ultrasonic motorized stage and prevent wear debris generated when the first and/or the second linear ultrasonic motor is driven from affecting the first and the second optical linear sensors, so that the first and the second linear ultrasonic motors and the first and the second optical linear sensors do not protrude upward from the upper surface of the second table.