US Patent Application 20100047447 - MULTIPLE SUBSTRATE ITEM HOLDER AND REACTOR
InventorUS Classes427/248.1, COATING BY VAPOR, GAS, OR SMOKE118/500, WORK HOLDERS, OR HANDLING DEVICES118/728, Work support118/708, CONDITION RESPONSIVE CONTROL414/806Of charging load-holding or -supporting element from source and transporting element to working, treating, or inspecting stationAttorney, Agent or FirmInternational ClassesC23C 16/00B05C 13/00 B05C 9/02 B65H 1/00 B05C 11/00 Abstract textMethods, apparatuses and systems are provided that may be used in performing controlled environment processes on substrate items within in at least one chamber A plurality of substrate items may be arranged at each of a plurality of horizontal levels within a vertically oriented stack of a substrate item holding assembly and moved into a reactor chamber and/or other like chamber and processed. |
| ||||||||||||||
