US Patent Application 20100032581 - MICRO-GRIPPER

Application 20100032581 Filed on March 9, 2007. Published on February 11, 2010

Inventors

US Classes

250/442.11, With object moving or positioning means294/86.4, GRAPPLE427/331, WITH POST-TREATMENT OF COATING OR COATING MATERIAL216/37, ETCHING AND COATING OCCUR IN THE SAME PROCESSING CHAMBER427/248.1, COATING BY VAPOR, GAS, OR SMOKE427/569, Plasma (e.g., corona, glow discharge, cold plasma, etc.)204/192.32, Sputter etching204/192.34, Ion beam etching (e.g., ion milling, etc.)204/192.38Vacuum arc discharge coating

Attorney, Agent or Firm

Antonelli, Terry, Stout & KRaus, LLP

Foreign Documents

10 2006 023 768. DE 05/20/2006

International Classes

B25J 7/00
H01J 37/26
B05D 3/00
B44C 1/22
C23C 16/44
C23C 16/50
C23C 14/34
C23C 14/46
C23C 14/32

Abstract text

A method is described for producing a micro-gripper, which comprises a base body and a gripping body connected integrally to the base body, which projects beyond the base body and provides a receptacle slot on a free end area in such a way that a micrometer-scale or sub-micrometer-scale object may be clamped in the receptacle slot for gripping and holding, as well as a micro-gripper according to the species.

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