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US Patent Application 20100028533 - Methods and Devices for Processing a Precursor Layer in a Group VIA Environment

Application 20100028533 Filed on March 4, 2009. Published on February 4, 2010

Inventors

US Classes

427/248.1, COATING BY VAPOR, GAS, OR SMOKE427/372.2Heating or drying (e.g., polymerizing, vulcanizing, curing, etc.)

Attorney, Agent or Firm

International Classes

C23C 16/44
B05D 3/02


Abstract text


Methods and devices for high-throughput printing of a precursor material for forming a film of a group IB-IIIA-chalcogenide compound are disclosed. In one embodiment, the method comprises forming a precursor layer on a substrate, the precursor is subsequently processed in one or more steps in a VIA environment.

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