InventorsAssigneeUS Classes310/323.06, Piezoelectric element or electrode310/317, Input circuit for mechanical output from piezoelectric element29/25.35, PIEZOELECTRIC DEVICE MAKING310/323.05SupportAttorney, Agent or FirmForeign Documents
International ClassesH02N 2/12H02N 2/14 H01L 41/22 Abstract textA piezoelectric motor that includes a rotor and a stator having a surface on which a driving member that is in contact with the rotor for rotating the rotor is disposed. The stator includes a stator body, a plurality of piezoelectric elements disposed on a surface of the stator body, and an electrode wiring plate integrally formed with the stator body. The piezoelectric elements are electrically connected to a plurality of electrodes formed on the electrode wiring plate through a plurality of wiring lines. The wiring lines are constituted by an electroconductive film extending from a surface of the stator body to the electrodes. |
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