Inventors
AssigneeUS Classes700/103, Constraints or rules702/81, Quality evaluation702/84, Quality control707/104.1, Application of database or data structure (e.g., distributed, multimedia, image)700/121, Integrated circuit production or semiconductor fabrication700/105, Rework or engineering change700/109, Quality control700/108Performance monitoringAttorney, Agent or FirmInternational ClassesG06F 19/00G01N 37/00 G06F 17/30 Abstract textMaterial management systems and methods include material storage vessels with information (e.g., electronic information) storage. Information may be communicated from a storage device to a process tool controller and employed to set or adjust a process tool operating parameter. Material information may be determined by remote analysis and subsequently communicated to an electronic information storage device of a vessel containing such material. Location and movement of material storage vessels within a customer facility may be automatically tracked, with further transfer of material-specific information. Product information may be associatively stored with material-specific information utilized in product manufacture. |
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