Claims

1-96. (canceled)

97. A method of treating a solid film on a substrate, comprising:introducing a plurality of catalyzing reactants into a reaction chamber containing said solid film;characterized in that said plurality of catalyzing reactants react in a catalyzing reaction;said catalyzing reaction is continuous and non-saturating;said catalyzing reaction generates a volatile by-product and an intermediate reactive molecular fragment;said intermediate reactive molecular fragment reacts with said solid film in a fragment-film reaction; andfurther comprising controlling a temperature of said chemical film to control said treating.

98. A method as in claim 97 wherein said intermediate reactive molecular fragment comprises hydrogen, and said hydrogen is incorporated into said chemical film during said fragment-film reaction.

99. A method as in claim 97 wherein said intermediate reactive molecular fragment comprises a hydrogen atom, and said hydrogen improves an interface between said solid film and said substrate.

100. A method as in claim 97 wherein said intermediate reactive molecular fragment comprises a hydrogen atom, and said hydrogen atom removes an in-film impurity.

101. A method as in claim 100 wherein said in-film impurity is selected from the group consisting of F, O, OH, Cl, and C.

102. A method as in claim 97 wherein said intermediate reactive molecular fragment comprises a dopant atom, and said dopant atom is incorporated into said chemical film during said fragment-film reaction.

103. A method as in claim 102 wherein said dopant atom is selected from the group consisting of B and P.

104. A method as in claim 97 wherein said treating comprises annealing said chemical film.

105-117. (canceled)