US Patent Application 20090324825 - Method for Depositing an Aluminum Nitride Coating onto Solid Substrates
InventorsUS Classes427/255.22, Iron compound containing base (e.g., ferric oxide, etc.)427/248.1, COATING BY VAPOR, GAS, OR SMOKE427/255.11, Base includes an inorganic compound containing silicon or metal (e.g., glass, ceramic, brick, etc.)427/255.21, Base includes inorganic metal containing compound427/255.395Inorganic coatingAttorney, Agent or FirmInternational ClassesC23C 16/44C23C 16/455 C23C 16/34 C23C 16/40 Abstract textEmbodiments related to chemical vapor deposition of aluminum nitride onto surfaces are provided. In particular, methods are provided for coating AlN onto solid surfaces by heating and vaporizing an aluminum nitride precursor and exposing solid surfaces to the heated and vaporized aluminum nitride precursor. In an embodiment, the aluminum nitride precursor is AlCl3(NH3)x, wherein x=1-6. In an embodiment, the surface is a metallic substrate, such as a silicon, aluminum nitride, steel, aluminum, molybdenum and manganese. In an embodiment, the surface is steel that is nitrided to form an iron nitride layer on which AlN is deposited. |
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