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US Patent Application 20090207493 - FOREIGN SUBSTANCE REMOVING DEVICE AND FOREIGN SUBSTANCE REMOVING METHOD

Application 20090207493 Filed on January 30, 2008. Published on August 20, 2009

Inventor

Assignee

US Classes

359/507, PROTECTION FROM MOISTURE OR FOREIGN PARTICLE310/328, With mechanical energy coupling means310/317Input circuit for mechanical output from piezoelectric element

Attorney, Agent or Firm

Foreign Documents

  • 2007-024178 JP 02/02/2007
  • 2007-314756 JP 12/05/2007

International Classes

G02B 27/00
B06B 1/06
H01L 41/09


Abstract text


There is provided a foreign substance removing device which is capable of moving a foreign substance in a desired direction at a high removing efficiency. The foreign substance removing device removes a foreign substance on an object. A vibrator has first and second piezoelectric elements provided on the object. Power supplies applies alternating voltages to the respective first and second piezoelectric elements. A control circuit controls the alternating voltages applied by the power supplies. The control circuit changes the frequency of the alternating voltage and at the same time makes respective phases of the alternating voltages applied to the first and second piezoelectric elements different from each other, so as to concurrently generate a first standing wave and a second standing wave different in order.

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