Abstract text

A substrate processing apparatus is reduced in communication cost and alleviated of the restriction on control site when the maintenance worker staying distant monitors in real-time a status change thereof.

The centralized control apparatus gathers data at a predetermined interval from the substrate processing apparatus, on a component-by-component basis which components constitute the substrate processing apparatus, determines a status of each of the components depending upon the collection data gathered and regulation control information including attribute information about each of the components, maintenance information and previously established status-determined information about each of the component, in predetermined timing established on a component-by-component basis, prepares processed data by processing data which the collection data is thinned out depending upon the determination result, and sends the control information including the determination result and the processed data to the terminal unit.