US Classes451/285, Rotary work holder451/289, Having vacuum or adhesive securing means451/44Edging
Attorney, Agent or Firm
International ClassesB24B 5/00
An apparatus and method are provided to polish an edge of a substrate. The invention includes a polishing head including a backing pad, wherein a width of the backing pad that contacts the substrate edge is larger than a width of a notch in the substrate edge. Numerous other aspects are provided.